21 September 1998 Method of evaluating and tolerancing interferometer designs
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Proceedings Volume 3482, International Optical Design Conference 1998; (1998); doi: 10.1117/12.322054
Event: International Optical Design Conference, 1998, Kona, HI, United States
Abstract
A ray tracing method of simulating interferometers from source to detector using standard optical design software is presented. The advantages, disadvantages and limitations of the method are discussed. The method is applied to the analysis of a phase measuring interferometer designed to test the form of cylindrical mechanical parts and the predicted performance is compared with experimental results.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul F. Michaloski, Andrew W. Kulawiec, Jon Fleig, "Method of evaluating and tolerancing interferometer designs", Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); doi: 10.1117/12.322054; https://doi.org/10.1117/12.322054
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KEYWORDS
Interferometers

Sensors

Wavefronts

Ray tracing

Collimators

Tolerancing

Monochromatic aberrations

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