21 September 1998 Microscanning system for laser applications
Author Affiliations +
Proceedings Volume 3482, International Optical Design Conference 1998; (1998) https://doi.org/10.1117/12.321987
Event: International Optical Design Conference, 1998, Kona, HI, United States
We have developed an integrated system for laser beam deflection, using a monolithic silica on silicon structure including microlenses and an electromechanical actuator. The scanner shows a maximum deflection angle of +/- 5 degree(s) for a static Voltage of about 130 V or continuous scanning of a field of 20 degree(s) for a 45 V signal at the resonance frequency. The device is fabricated by a surface micromachining process of a silica layer on silicon substrate with no subsequent assembling steps involved.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan Bechtle, Jan Bechtle, H. Grateau, H. Grateau, Pierre Labeye, Pierre Labeye, P. Bezesty, P. Bezesty, Karine Petroz, Karine Petroz, } "Microscanning system for laser applications", Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); doi: 10.1117/12.321987; https://doi.org/10.1117/12.321987

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