20 October 1998 Laser-assisted etching of diamonds in air and in liquid media
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Proceedings Volume 3484, Lasers in Synthesis, Characterization, and Processing of Diamond; (1998) https://doi.org/10.1117/12.328201
Event: Lasers in Synthesis, Characterization, and Processing of Diamond, 1997, Tashkent, Uzbekistan
Abstract
Etching with the help of a copper vapor laser of diamond polycrystalline CVD films is studied in various surrounding media. Diamond samples are virtually transparent at this wavelength, and the coupling of laser radiation to diamond is due to the formation of a thin graphitized layer at the diamond surface. The etching rate in liquid media is slightly higher than in air at otherwise equal conditions and is as high as 50 micrometers /s under the etching with a scanning laser beam. The diamond surface etched in liquids is virtually free of the glassy carbon layer. Electroless deposition of metals on the laser-etched features is studied to compare the catalytic activity of he diamond surface etched in air with that etched in liquids. Possible mechanisms are discussed responsible for the observed difference both in the structure of the etched area and in the electroless metal deposition onto the surface etched in various media.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George A. Shafeev, George A. Shafeev, "Laser-assisted etching of diamonds in air and in liquid media", Proc. SPIE 3484, Lasers in Synthesis, Characterization, and Processing of Diamond, (20 October 1998); doi: 10.1117/12.328201; https://doi.org/10.1117/12.328201
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