Oxygen-assisted laser cutting and drilling of CVD diamond

V. V. Migulin; Victor G. Ralchenko; Y.-J. Baik

doi:10.1117/12.328205

20 October 1998 Oxygen-assisted laser cutting and drilling of CVD diamond

V. V. Migulin, Victor G. Ralchenko, Y.-J. Baik

Proceedings Volume 3484, Lasers in Synthesis, Characterization, and Processing of Diamond; (1998) https://doi.org/10.1117/12.328205
Event: Lasers in Synthesis, Characterization, and Processing of Diamond, 1997, Tashkent, Uzbekistan

Abstract

A Nd:YAG laser was used for cutting and drilling of thick free-standing diamond films produced by microwave plasma chemical vapor deposition. The laser machining rate was evaluated at different irradiation parameters such as laser power, beam scanning velocity and number of repetitive scans. Carbon oxidation in presence of oxygen flow in the cutting/drilling area is shown to result in smooth and clean sidewalls and top surface around grooves and holes. A beneficial effect of O₂ stream on cutting and drilling rate was also observed.

Citation Download Citation

V. V. Migulin, Victor G. Ralchenko, and Y.-J. Baik "Oxygen-assisted laser cutting and drilling of CVD diamond", Proc. SPIE 3484, Lasers in Synthesis, Characterization, and Processing of Diamond, (20 October 1998); https://doi.org/10.1117/12.328205

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available