21 October 1998 Solution of the incorrect inverse ellipsometric problem
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Proceedings Volume 3485, 11th International Vavilov Conference on Nonlinear Optics; (1998) https://doi.org/10.1117/12.328252
Event: Eleventh International Vavilov Conference on Nonlinear Optics, 1997, Novosibirsk, Russian Federation
Abstract
The present work is devoted to the analysis of the ill-posed inverse ellipsometric problem. Manifestations of the incorrectness of the problem are described for the case of ultrathin films. Special attention is given to the choice of the criteria for the optimal point. It is shown that an obvious and frequently used criterion expressed as a condition on difference functional So less than or equal to (delta) 2, where (delta) is an average error in the measurement polarization angles, is practically useless in our case in the region strong incorrectness. New criteria for the choice of the optimal point are therefore suggested. As a result, the stable solution of the inverse ellipsometric problem is obtained which permits to study successfully the surface films in the thickness range 2 - 10 nm.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. V. Bobro, Anatolij S. Mardezhov, A. I. Semenenko, "Solution of the incorrect inverse ellipsometric problem", Proc. SPIE 3485, 11th International Vavilov Conference on Nonlinear Optics, (21 October 1998); doi: 10.1117/12.328252; https://doi.org/10.1117/12.328252
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