22 May 1998 Design of multifunctional diffractive optical element by overwrite grating
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Proceedings Volume 3490, Optics in Computing '98; (1998) https://doi.org/10.1117/12.308960
Event: Optics in Computing '98, 1998, Bruges, Belgium
Abstract
We develop a novel design of diffractive optical elements fabricated by an electron-beam lithography for free-space optical interconnection. This element is synthesized by multi-functional computer-generated holograms with the over- write grating. Diffractive optical elements including Fraunhofer and image type holograms have been fabricated. The concept and the fabrication process of this element are presented.
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Nobukazu Yoshikawa, Nobukazu Yoshikawa, Masahide Itoh, Masahide Itoh, Toyohiko Yatagai, Toyohiko Yatagai, "Design of multifunctional diffractive optical element by overwrite grating", Proc. SPIE 3490, Optics in Computing '98, (22 May 1998); doi: 10.1117/12.308960; https://doi.org/10.1117/12.308960
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