Miniaturized focusing fan-out elements: design, fabrication, and characterization

Andreas Schilling; Philippe Nussbaum; Christian Ossmann; Silke Traut; Markus Rossi; Helmut Schift; Hans Peter Herzig

doi:10.1117/12.308971

22 May 1998 Miniaturized focusing fan-out elements: design, fabrication, and characterization

Andreas Schilling, Philippe Nussbaum, Christian Ossmann, Silke Traut, Markus Rossi, Helmut Schift, Hans Peter Herzig

Proceedings Volume 3490, Optics in Computing '98; (1998) https://doi.org/10.1117/12.308971
Event: Optics in Computing '98, 1998, Bruges, Belgium

Abstract

Fan—out phase gratings are micro—optical elements vhicli split an incoming beani into au arra of light beanis with equal power. whereas the diffracted beams are focused by a Fourie-transforin lens. These elements are used. for example. iii optical iiitercoiuiects. in multidetector systems. and in parallel optical processing [ I I. We present different concepts for the fabrication of lwbrid elements which combine the faii-out and focusing function. The combination of the refractive and diffractive function results in a monolithic element with miniaturized dimensions and has therefore a high potential for applications in optical microsystems. To achieve this functionality. we used two different designs and different fabrication technologies. The hybrid elements were fabricated by injection moulding. double-sided photolithographv. and direct laser writing. Single elements as well as large arrays of elements have been fabricated.

Citation Download Citation

Andreas Schilling, Philippe Nussbaum, Christian Ossmann, Silke Traut, Markus Rossi, Helmut Schift, and Hans Peter Herzig "Miniaturized focusing fan-out elements: design, fabrication, and characterization", Proc. SPIE 3490, Optics in Computing '98, (22 May 1998); https://doi.org/10.1117/12.308971

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KEYWORDS

Photoresist materials

Microlens

Fluctuations and noise

Diffraction

Diffraction gratings

Optical components

Microlens array

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