4 December 1998 Hybrid integration of micro-optic and optoelectronic elements by replication in polymers
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Proceedings Volume 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications; (1998); doi: 10.1117/12.328748
Event: 1998 International Conference on Applications of Photonic Technology, 1998, Ottawa, Canada
Abstract
After demonstration of a large variety of microoptic and optoelectronic components in many institutions world-wide, the main interest is focused on their hybrid integration into miniaturized systems. This concerns modules comprising lightsources, detectors, conventional and microoptical elements, like lenses, prisms, filters, and, for some applications, miniaturized actuators. A solution is described for replication of polymer microoptical elements on arbitrary substrates (semiconductor, glass). The replication is done on wafer scale level and includes the adjustment step between the optical elements and the substrate. Demonstrators are 90 degree(s) deflection prisms for the efficient coupling between monomode waveguides and photodiodes and various microlens-arrays. From the many different replication techniques, UV-reaction molding is chosen for this application. This technique has advantages against hot embossing and injection molding. Network polymers which are stable against temperature changes can be used. The replication is made in thin layers on a solid substrate resulting in high mechanical stability and very good flatness of the samples. There is neither mechanical stress nor thermal load on the substrate which can be a fully processed semiconductor wafer containing elements like diodes or VCSELs.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas H. Braeuer, Peter Dannberg, Lars Erdmann, "Hybrid integration of micro-optic and optoelectronic elements by replication in polymers", Proc. SPIE 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications, (4 December 1998); doi: 10.1117/12.328748; https://doi.org/10.1117/12.328748
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KEYWORDS
Polymers

Chemical elements

Prisms

Semiconducting wafers

Glasses

Photomasks

Lenses

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