Paper
4 December 1998 Method of proton exchange in lithium niobate
Wiley K. Smith
Author Affiliations +
Abstract
This report is on a new method of proton exchange that is much easier to use than current methods, is of equal optical quality, less substrate stress, and lends itself to large scale manufacturing. This process relates to annealed proton-exchanged guided wave devices in lithium niobate (LiNbO3) and lithium tantalate (LiTaO3) used in integrated optic circuits (IOC's). IOC's are useful in fiber optic gyros, photonic switching devices, and intensity/phase modulation systems. They have low optical loss, low voltage drive, high frequency bandwidth, and small size and weight.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wiley K. Smith "Method of proton exchange in lithium niobate", Proc. SPIE 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications, (4 December 1998); https://doi.org/10.1117/12.328755
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KEYWORDS
Titanium

Semiconducting wafers

Waveguides

Lithium niobate

Lithium

Optics manufacturing

Photoresist materials

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