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4 December 1998 Silica-based rib waveguides for integrated optics using multimode interference
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Abstract
Integrated optical waveguides, as well as splitters and switches utilizing the principle of multimode interference have been realized in PECVD SiON/SiO2 technology. The waveguide design has been optimized to meet a number of requirements, such as small device size, polarization- independent operation, and low-power active operation. The design, fabrication, and initial experimental results for these devices are discussed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. S. Lagali, R. Ian MacDonald, M. Reza Paiam, Kerstin Woerhoff, and Alfred Driessen "Silica-based rib waveguides for integrated optics using multimode interference", Proc. SPIE 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications, (4 December 1998); https://doi.org/10.1117/12.328759
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