23 July 1999 Depth profiling of sol-gel multilayers on fused silica using dynamic SIMS and SNMS
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Proceedings Volume 3492, Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion; (1999) https://doi.org/10.1117/12.354238
Event: Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion, 1998, Monterey, CA, United States
Abstract
Depth profiling using Dynamic Secondary Ion Mass Spectroscopy through multilayer coatings on fused silica substrates has revealed the effect of increasing the number of layers in the stack. Results are presented for both spin and dip coated multilayers and a significant difference in the interfacial boundary is seen between the two processes. Individual layer thicknesses were estimated using this technique and compared to values gained from UV-Visible spectroscopy. Depth profiling using SNMS of a thick 2-layer system also revealed the thickness of the layers and an indication of the intermixing between them. These measurements agreed well with UV-Vis data. A comparison between these depth-profiling techniques and previous work using AES/XPS depth profiling is discussed.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nicholas J. Bazin, Nicholas J. Bazin, James E. Andrew, James E. Andrew, Hazel A. McInnes, Hazel A. McInnes, K. J. Porter, K. J. Porter, A. J. Morris, A. J. Morris, } "Depth profiling of sol-gel multilayers on fused silica using dynamic SIMS and SNMS", Proc. SPIE 3492, Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion, (23 July 1999); doi: 10.1117/12.354238; https://doi.org/10.1117/12.354238
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