23 July 1999 Laser-induced damage of optical coatings grown with surface chemical reaction
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Proceedings Volume 3492, Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion; (1999); doi: 10.1117/12.354234
Event: Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion, 1998, Monterey, CA, United States
Abstract
We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be preciously controlled only by the number of cycles. Two-layer TiO2/Al2O3 anti-reflection coating with less than 0.2 percent reflection loss at 532nm was fabricated. Laser induced threshold strongly depend on the growth temperature and the introduced gas pressure. They increasing with decreasing the growth temperature and with increasing the introduced gas pressure.
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Shin-ichi Zaitsu, Shinji Motokoshi, Takahisa Jitsuno, Tatsuhiko Yamanaka, "Laser-induced damage of optical coatings grown with surface chemical reaction", Proc. SPIE 3492, Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion, (23 July 1999); doi: 10.1117/12.354234; https://doi.org/10.1117/12.354234
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KEYWORDS
Laser damage threshold

Chemical reactions

Laser induced damage

Optical coatings

Refractive index

Molecules

Antireflective coatings

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