27 August 1998 In-line inspection optimization using a yield management system
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Abstract
We have studied optimization of in-line inspection in terms of Cost of Ownership. We have defined that Cost of Yield Loss of in-line inspection steps is 'the potential cost of products lost by unfitness of in-line inspection' and cleared that optimized of in-line inspection is 'the cost reduction of yield loss brought by missing the occurrence of process or process tool excursions'. From this point of view, we have studied and proposed a method for in-line inspection optimization.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fumio Mizuno, Seiji Isogai, "In-line inspection optimization using a yield management system", Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); doi: 10.1117/12.324406; https://doi.org/10.1117/12.324406
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