Noncontact COS charge analysis for in-line monitoring of wet cleaning processes

Xiafang Zhang; Min Juang; Sung-Shan Tai; Kuo-in Chen; Ejigu Wossen; Gregory Horner

doi:10.1117/12.324398

27 August 1998 Noncontact COS charge analysis for in-line monitoring of wet cleaning processes

Xiafang Zhang, Min Juang, Sung-Shan Tai, Kuo-in Chen, Ejigu Wossen, Gregory Horner

Proceedings Volume 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II; (1998) https://doi.org/10.1117/12.324398
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

Abstract

Contamination levels in chemical cleaning equipment and wafer cleanliness in general are very critical to semiconductor manufacturers. In this work, a Keithley Instruments non contact electrical tester (Quantox) is used to measure the mobile ion (Qm) contamination in a variety of cleaning processes. Results show that photoresist strip cleaning process has a higher mobile ion concentration than standard pre-diffusion cleaning process. RCA1, RCA2 and HF solutions mapping measured by the Quantox indicates some negative static charges on the surface after cleaning. This negative field appears to assist Qm removal during wet chemical cleaning. The dependence of flatband voltage and other oxide charges on various cleaning processes has also been investigated using the Quantox. The data suggests that a dipole layer has been formed by a surface reaction during chemical cleaning.

Citation Download Citation

Xiafang Zhang, Min Juang, Sung-Shan Tai, Kuo-in Chen, Ejigu Wossen, and Gregory Horner "Noncontact COS charge analysis for in-line monitoring of wet cleaning processes", Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); https://doi.org/10.1117/12.324398

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available