27 August 1998 Optical fiber profilometer with submicronic accuracy
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Abstract
This paper describes the experimental setup, test procedure and data-processing of the new profilometer based on an optical fiber displacement sensor. For performing test procedure this sensor is mounted on a high precision linear stage. The optical fiber probe consists of a bundle of optical fibers in a a star configuration. The linear displacement system is mounted on hydrostatic bearings, the guideways are made from zerodur with a planeity better than 0,25 micrometers . The stage is moved by a friction drive over a distance of 220 mm and controlled by an optical encoder with a resolution of 4 nm. The surface profile of a piece from standard polished stainless steel measured by our profilometer is presented.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasser Alayli, Danping Wang, Marc Bonis, "Optical fiber profilometer with submicronic accuracy", Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); doi: 10.1117/12.324423; https://doi.org/10.1117/12.324423
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