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27 August 1998 Optical fiber profilometer with submicronic accuracy
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This paper describes the experimental setup, test procedure and data-processing of the new profilometer based on an optical fiber displacement sensor. For performing test procedure this sensor is mounted on a high precision linear stage. The optical fiber probe consists of a bundle of optical fibers in a a star configuration. The linear displacement system is mounted on hydrostatic bearings, the guideways are made from zerodur with a planeity better than 0,25 micrometers . The stage is moved by a friction drive over a distance of 220 mm and controlled by an optical encoder with a resolution of 4 nm. The surface profile of a piece from standard polished stainless steel measured by our profilometer is presented.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasser Alayli, Danping Wang, and Marc Bonis "Optical fiber profilometer with submicronic accuracy", Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998);


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