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27 August 1998 Value added with in-line electrical characterization: fact or fiction?
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Abstract
Although it is generally accepted that in-line and off-line electrical characterization measurements have value in a semiconductor fab, their actual value to a specific fab depends heavily on a wide variety of parameters such as: the fab's end product and throughput; the sensitivity of the measurements to various process deviations and the implementation cost; etc. This paper will detail some of these dependencies and develop an economic method for the justification of various in-line electrical tests.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven R. Weinzierl and Tim E. Turner "Value added with in-line electrical characterization: fact or fiction?", Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); https://doi.org/10.1117/12.324396
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