Visit My Account to manage your email alerts.
Recognition of defects of the surfscan installation TENCOR 7600 depending on the situation and size of the defect
Characterization of snap-back breakdown and its temperature dependence up to 300°C including circuit-level model and simulation
Accurate determination of the hydrogen concentration of silicon nitride layers by Fourier transform spectroscopy
Enhanced hot-carrier-induced degradation of 0.25-μm P-MOSFETs with oxide/nitride composite spacer compared to those with oxide spacer
Equipment challenges for a total material system change: enabling device manufacturing at 130 nm and below