28 August 1998 Metal-induced oxide degradation studied by surface photovoltage and mercury-probe measurements
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Abstract
In this paper we study oxide deterioration caused by metal contamination using the Mercury-probe and the Surface Photovoltage techniques. It is found that deterioration caused by metal concentration as low as approximately equals 1010 cm-2 can be monitored performing stepped current measurements. This sensitivity makes the Mercury-probe technique attractive for fast-feedback evaluation of gate oxide integrity.
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Antonio Cacciato, Antonio Cacciato, S. Evseev, S. Evseev, S. Vleeshouwers, S. Vleeshouwers, I. Rink, I. Rink, "Metal-induced oxide degradation studied by surface photovoltage and mercury-probe measurements", Proc. SPIE 3510, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV, (28 August 1998); doi: 10.1117/12.324377; https://doi.org/10.1117/12.324377
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