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Diffusion-induced dislocations in highly boron-doped silicon layers used for bulk micromachining applications
Growth and characterization of shape memory alloy thin films for micropositioning and microactuation
Novel fabrication of comb actuator using RIE of polysilicon and (110) Si anisotropic bulk etching in KOH
Uniform and simultaneous fabrication of high-precision and high-density orifice, channel, and reservoirs for ink-jet printheads
Fabrication of freestanding microstructures using UV lithography and double-electroplating technique
CMOS compatibiltity of high-aspect-ratio micromachining (HARM) in bonded silicon-on-insulator (BSOI)