Adhesion, friction, and wear are prevalent problems in a majority of MEMS devices. Understanding of surface interactions in MEMS is of paramount importance for controlling stiction phenomena. This paper will discuss various surface treatments employed to reduce adhesion and friction in polysilicon-based MEMS, their successes and their limitations.
"Antistiction coatings for surface micromachines", Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); doi: 10.1117/12.324288; https://doi.org/10.1117/12.324288