31 August 1998 Antistiction coatings for surface micromachines
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Proceedings Volume 3511, Micromachining and Microfabrication Process Technology IV; (1998) https://doi.org/10.1117/12.324288
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
Adhesion, friction, and wear are prevalent problems in a majority of MEMS devices. Understanding of surface interactions in MEMS is of paramount importance for controlling stiction phenomena. This paper will discuss various surface treatments employed to reduce adhesion and friction in polysilicon-based MEMS, their successes and their limitations.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roya Maboudian, Roya Maboudian, } "Antistiction coatings for surface micromachines", Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); doi: 10.1117/12.324288; https://doi.org/10.1117/12.324288
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