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31 August 1998 Automatic microassembly of radar sensors for automotive applications
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Proceedings Volume 3511, Micromachining and Microfabrication Process Technology IV; (1998) https://doi.org/10.1117/12.324291
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
For the assembly of miniaturized radar distance sensors vacuum gripers for handling touch sensitive and very small millimeter wave monolithic integrated circuits (M3IC's) have been developed. The grippers are designed modularly to allow different combinations of gripper heads, chip-specific gripper plates and gripper exchange interfaces. The manufacture of the gripper components by (mu) -EDM and the batch processing of photoetchable glass is presented. In addition, a solution for the removal of M3IC's from adhesive carriers, such as VR Gel-Paks and bluetape with vacuum support has been developed which is suitable for automatic pick & place machine routines.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthias Nienhaus, Wolfgang Ehrfeld, Frank Michel, V. Graeff, and Andrej Wolf "Automatic microassembly of radar sensors for automotive applications", Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); https://doi.org/10.1117/12.324291
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