PMMA microstructure as KrF excimer-laser LIGA material

Chii-Rong Yang; Bruce C. S. Chou; Hsiao-Yu Chou; Frank H. S. Lin; Wen-Kai Kuo; Roger G. S. Luo; Jer-Wei Chang; Z. J. Wei

doi:10.1117/12.324320

31 August 1998 PMMA microstructure as KrF excimer-laser LIGA material

Chii-Rong Yang, Bruce C. S. Chou, Hsiao-Yu Chou, Frank H. S. Lin, Wen-Kai Kuo, Roger G. S. Luo, Jer-Wei Chang, Z. J. Wei

Author Affiliations +

Proceedings Volume 3511, Micromachining and Microfabrication Process Technology IV; (1998) https://doi.org/10.1117/12.324320
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

PMMA (polymethyl methacrylate) has been widely used as x-ray LIGA material for its good features of electrical acid plating of all common metals to industrial applications. Unlike the tough characteristics of polyimide in almost all alkaline and acid solutions, PMMA is easily removed in chemical etchants after electroplating process. For this reason, ablation- etching characteristics of PMMA material for 3D microstructures fabrication using a 248 nm KrF excimer laser were investigated. Moreover, the uses of the laminated dry film were also studied in this work. Experimental results show that PMMA microstructures can produce the near-vertical side- wall profile as the laser fluence up to 2.5 J/cm². PMMA templates with high aspect ratio of around 25 were demonstrated, and the sequential electroplating processes have realized the metallic microstructures. Moreover, the microstructures fabricated in dry film show the perfect side- wall quality, and no residues of debris were found.

Citation Download Citation

Chii-Rong Yang, Bruce C. S. Chou, Hsiao-Yu Chou, Frank H. S. Lin, Wen-Kai Kuo, Roger G. S. Luo, Jer-Wei Chang, and Z. J. Wei "PMMA microstructure as KrF excimer-laser LIGA material", Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); https://doi.org/10.1117/12.324320

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