Microfabrication of high-aspect-ratio Bi-Te alloy microposts and applications in microsized cooling probes

Lei Huang; Wanjun Wang; Michael C. Murphy

doi:10.1117/12.324076

1 September 1998 Microfabrication of high-aspect-ratio Bi-Te alloy microposts and applications in microsized cooling probes

Lei Huang, Wanjun Wang, Michael C. Murphy

Author Affiliations +

Proceedings Volume 3512, Materials and Device Characterization in Micromachining; (1998) https://doi.org/10.1117/12.324076
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

High aspect-ratio microposts of bismuth-telluride alloy with a height of up to 750 micrometer and a diameter of 150 micrometer have been fabricated with the LIGA technique. This work is the part of an on-going research effort to develop a microprobe based on Peltier effect for highly localized temperature manipulation on the microscale. Bismuth-telluride alloys were electrodeposited galvanostatically on a titanium substrate using an acidic solution containing Bi³⁺ and HTeO₂^- ions in 1 mol dm^-3 nitric acid (pH equals 0). The Bi-Te alloy microposts were found to be monophasic, exhibit a polycrystalline structure, demonstrate excellent adhesion on the substrate and with good mechanical strength. The chemical composition of the microposts was dependent on the electrolyte composition of deposition bath and the current density used in the electroplating; by controlling these two factors either p- or n-type Bi-Te alloy microposts may be produced. This research demonstrates that the microfabrication of Peltier effect probes is feasible.

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Lei Huang, Wanjun Wang, and Michael C. Murphy "Microfabrication of high-aspect-ratio Bi-Te alloy microposts and applications in microsized cooling probes", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); https://doi.org/10.1117/12.324076

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