Microtribiology and self-lubrication microsystems

Yangchao Tian; Gang Liu; Yilin Hong; Shaojun Fu; Yiguan Hu

doi:10.1117/12.324065

1 September 1998 Microtribiology and self-lubrication microsystems

Yangchao Tian, Gang Liu, Yilin Hong, Shaojun Fu, Yiguan Hu

Proceedings Volume 3512, Materials and Device Characterization in Micromachining; (1998) https://doi.org/10.1117/12.324065
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

The microtribology phenomena on the micro contact (or slide) surface, where the effects of surface forces are more significant than those of gravity, is very different with the conventional machine. The friction force that works on a friction face of a microsystems is significantly high relative to the size of the machine, the fluid lubrication in the conventional size mechanical parts cannot reduce the friction force on the microsystems, the solid lubrication (self- lubrication) should be applied to reduce the friction force. In this paper, the solid lubrication MoS₂ was studied. MoS₂ is embedded into the Ni structure in electroforming process. The results show that MoS₂ can be used as the solid lubrication in the microsystems to reduce the friction force and enhance the hardness of microsystem.

Citation Download Citation

Yangchao Tian, Gang Liu, Yilin Hong, Shaojun Fu, and Yiguan Hu "Microtribiology and self-lubrication microsystems", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); https://doi.org/10.1117/12.324065

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available