1 September 1998 Noncontact microtorque measurement for motors in MEMS
Author Affiliations +
Proceedings Volume 3512, Materials and Device Characterization in Micromachining; (1998) https://doi.org/10.1117/12.324057
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
An important performance criterion for practicable microactuators is the value of output torque. For the torque to be measured is very small, the influence of frictional force and other factors on testing are difficult avoided. So a new noncontact and direct experimental method was proposed, the basic theory and a simple and low-cost design of the measuring instrument is described in this paper. The testing range of shaft torque is from 10-4Nm to 10-7.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yihui Wu, Yihui Wu, Hongguang Jia, Hongguang Jia, Tongyu Wang, Tongyu Wang, Li-Ding Wang, Li-Ding Wang, } "Noncontact microtorque measurement for motors in MEMS", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); doi: 10.1117/12.324057; https://doi.org/10.1117/12.324057

Back to Top