Novel technique to measure thermal conductivity of thin film membranes

Andrea Irace; Pasqualina M. Sarro

doi:10.1117/12.324081

1 September 1998 Novel technique to measure thermal conductivity of thin film membranes

Andrea Irace, Pasqualina M. Sarro

Proceedings Volume 3512, Materials and Device Characterization in Micromachining; (1998) https://doi.org/10.1117/12.324081
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

In this paper we present a novel technique to measure the thermal conductivity of thin film membranes. A very simple structure consisting of a polysilicon resistor as a heater and a polysilicon-aluminum thermocouple as a temperature sensor, both placed on a SiN membrane, is needed. Next to characterize the thermal conductivity of the SiN thin film, we have also been able to measure the thermal conductivity of SiO and polysilicon thin layers deposited onto the SiN membrane. The results obtained are in good agreement with previously published data obtained with different techniques.

Citation Download Citation

Andrea Irace and Pasqualina M. Sarro "Novel technique to measure thermal conductivity of thin film membranes", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); https://doi.org/10.1117/12.324081

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