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Optical characteristics of GaAs MSM photodetectors flip-chip bonded upon micromirrors using micromachined conductive polymer bumps
Modeling and measurement of electrostatic micromirror array fabricated with single-layer polysilicon micromachining technology
Highly sensitive hydrogen sensors using palladium-coated fiber optics with exposed cores and evanescent field interactions
Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches
Silicon wafer-scale microfabrication factory using scanning probe microrobots: applications of MOEMS in manufacturing
MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities