2 September 1998 Characterization of micro-opto-electro-mechanical devices
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Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998); doi: 10.1117/12.324278
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
This paper describes two examples, which include thermal and comb-drive actuators for optical sensor applications. In both examples, numerical simulation was used to provide an optimum design. A 2D finite element modeling (FEM) was used to predict the state of stress and deformation in the MEM cantilever beam and also to analyze the materials and designs so as to minimize the stress state in the structure. The initial processed device showed a small warpage of more than 300 micrometers , which was not acceptable for Rockwell system applications. Using FEM, these devices were optimized to drastically reduce the residual stresses, and resulted in actual fabricated warpage-free structures. Once practical structures were found, parametric 2- and 3-D models were developed to verify mechanical reliability and the final architecture of the MEM device. The second device example was a MEM comb-drive structure. The frequency response of these dynamic structures provide the designer with the minimum detectable signal which can be resolved as well as the deflection of the mass per given acceleration. Therefore, the knowledge of an accurate frequency response is critical for successful design. Accurate FEM modeling provides the coefficients of the second order differential equation which describes mechanical behavior of the accelerometer. These coefficients can be used to create an equivalent circuit model. The model can be simulated in SPICE together with its interface electronics to evaluate the complete sensor performance.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mahyar S. Dadkhah, Amit Burstein, M. Edward Motamedi, Sangtae Park, "Characterization of micro-opto-electro-mechanical devices", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); doi: 10.1117/12.324278; https://doi.org/10.1117/12.324278
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KEYWORDS
Actuators

Finite element methods

Silicon

Device simulation

Microelectromechanical systems

Chemical elements

Signal detection

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