2 September 1998 High-brightness projection display systems based on the thin-film actuated mirror array (TFAMA)
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Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998) https://doi.org/10.1117/12.324276
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
The Thin-Film Actuated Mirror Array (TFAMA) is a new reflective type spatial light modulator developed by using the microelectromechanical system technology. The micromachined thin-film piezoelectric actuators are used to control the tilting angle of micromirrors. This paper describes the principle, design, fabrication and the performance of the TFAMA module for high-brightness projection displays. Maximizing the optical performance in terms of the fill factor and the mirror flatness is the main issue of this paper. A hidden actuator design with the two- spacer process provides the highest optical efficiency among the reflection light modulators at the present time. A working projector prototype of 5,000 ANSI lumen is realized with three TFAMA modules with a 1 kW Xenon lamp.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kyu-Ho Hwang, Kyu-Ho Hwang, Myung-Kwon Koo, Myung-Kwon Koo, Sang-Gook Kim, Sang-Gook Kim, } "High-brightness projection display systems based on the thin-film actuated mirror array (TFAMA)", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); doi: 10.1117/12.324276; https://doi.org/10.1117/12.324276
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