8 September 1998 Hybrid microdosing system
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Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323917
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
Based on an article in print this paper presents a hybrid assembled bi-directional micro dosing system for a water flow range of -40 (mu) l/min to 80 (mu) l/min. The system consists of a silicon micropump/valve chip (9 mm X 9 mm) and a silicon flow sensor (6 mm X 12 mm). The valve/pump can be driven by either a piezoelectric disk or an electrostatic actuator. Both, piezoelectric and electrostatic actuation for the pump/valve, the technology of each component and the hybrid assembling of the whole system are described. Results of transient numerical simulation of the pump and the mass flow sensor are presented and compared with experimental results. Descriptions of two different operational modes of the micro dosing system are given. The new pulse-width modulated control method for the actuator makes controlling the system easier. It allows an open-loop control of the pump rates without changing the driving frequency. All reported micropumps were driven by a square-wave signal which causes a relatively high noise level. In contrast to this, sawtooth and sinusoidal signals generate a smooth and quiet operation because of the small drag force on the fluid ports. Results of different driving methods are presented and compared.
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Nam-Trung Nguyen, Nam-Trung Nguyen, Stefan Richter, Stefan Richter, Jan Mehner, Jan Mehner, Steffen Schubert, Steffen Schubert, Wolfram Doetzel, Wolfram Doetzel, Thomas Gessner, Thomas Gessner, } "Hybrid microdosing system", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323917; https://doi.org/10.1117/12.323917
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