8 September 1998 Long-term stability of membrane transducers for proximity sensing
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Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323896
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
We report on the long-term stability of micromachined silicon membrane resonators for ultrasound based object detection and proximity sensing. The proximity sensor system measures distances up to 10 cm using either a phase or an acoustic Fabry-Perot measurement method. In these applications the transducer elements are continuously excited at their fundamental resonance using the thermomechanical excitation principle. The success of the sensor system depends on the reliability and stability of the micromachined devices, which are fabricated using an industrial pressure sensor process.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark Hornung, Mark Hornung, Oliver Brand, Oliver Brand, Oliver Paul, Oliver Paul, Henry Baltes, Henry Baltes, } "Long-term stability of membrane transducers for proximity sensing", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323896; https://doi.org/10.1117/12.323896

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