Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs

Gokhan Percin; Butrus T. Khuri-Yakub

doi:10.1117/12.323916

8 September 1998 Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs

Gokhan Percin, Butrus T. Khuri-Yakub

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323916
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

In this article, we present micromachined 2D array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We manufacture the transducer in 2D arrays using planar silicon micromachining combined with reactive ion etching of bulk silicon to provide back access holes. Such an array could be combined with an on-board driving and an addressing circuitry.

Citation Download Citation

Gokhan Percin and Butrus T. Khuri-Yakub "Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323916

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