8 September 1998 Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs
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Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323916
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
In this article, we present micromachined 2D array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We manufacture the transducer in 2D arrays using planar silicon micromachining combined with reactive ion etching of bulk silicon to provide back access holes. Such an array could be combined with an on-board driving and an addressing circuitry.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gokhan Percin, Gokhan Percin, Butrus T. Khuri-Yakub, Butrus T. Khuri-Yakub, } "Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323916; https://doi.org/10.1117/12.323916
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