8 September 1998 Micromachined gas detector based on self-aligned ionization tips
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Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323915
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
In this article, a micromachining technique is described which is an improvement to our previous technique. It allows metallic sharp and self-aligned tips to be fabricated for use as a gas detector. The fabrication technique has important advantages which makes it applicable to a wide variety application, in particular gas detection. These include simplicity and a low manufacturing cost. These tips were designed and fabricated with standard IC microfabrication technologies. However, the major highlight and achievement is the use of a low-resolution mask to position sharp tips very close to a second electrode in a simple self-aligned process. The detector exhibits a linear sensitivity response. The minimum-measured sensitivity of the detector, for the selected sample gas (CH3COOH), is 14 ppm and this was accomplished at a modest operating voltage of only 5 V. The voltage versus measured current of the detector, reveals a exponential behavior which indicates the field ionization to be responsible for detection process.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bahram Ghodsian, Bahram Ghodsian, Marek Syrzycki, Marek Syrzycki, M. Parameswaran, M. Parameswaran, } "Micromachined gas detector based on self-aligned ionization tips", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323915; https://doi.org/10.1117/12.323915

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