8 September 1998 Polysilicon for everything?
Author Affiliations +
Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323901
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
We review some of the attractive attributes of microengineering and relate them to features of the highly successful silicon microelectronics industry. We highlight the need for cost effective functionality rather than ultimate performance as a driver for success and review key examples of polysilicon devices from this point of view. The effective exploitation of the data generated by the cost effective polysilicon sensors is also considered and we conclude that `non traditional' data analysis will need to be exploited if full use is to be made of polysilicon devices.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. C. L. Ward, M. C. L. Ward, Mark E. McNie, Mark E. McNie, Robert J.T. Bunyan, Robert J.T. Bunyan, David O. King, David O. King, Roger Timothy Carline, Roger Timothy Carline, Rebecca Wilson, Rebecca Wilson, J. P. Gillham, J. P. Gillham, } "Polysilicon for everything?", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323901; https://doi.org/10.1117/12.323901
PROCEEDINGS
9 PAGES


SHARE
RELATED CONTENT

Microelectronics CAD education in France
Proceedings of SPIE (September 29 1999)
Stress measurements in silicon microstructures
Proceedings of SPIE (June 07 2000)
Anisotropic chemical etching of silicon
Proceedings of SPIE (April 16 1998)

Back to Top