10 September 1998 Design and fabrication of variable focusing lens
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Proceedings Volume 3515, Microfluidic Devices and Systems; (1998) https://doi.org/10.1117/12.322093
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
The variable focusing lens is designed and fabricated, which can work as human eye's crystalline lens. The lens consists of glass diaphragms, microchannels and working fluid. The chamber between two glass diaphragms is filled with the working fluid. Refractive index matching oil such as silicon oil can be used as working fluid, which is pumped into or out of the chamber through the microchannel. The curvature of the lens can be changed by the oil pressure, which is built by micropump outside. The change of curvature of the lens produces the focal plane shift. In addition, both convex lens and concave lens can be realized by pressurized working oil. Commercial micropump is used for the test of a fabricated variable focusing lens. Designed diameter of the variable focusing lens is 10 mm. Thickness of the glass diaphragm is 50 micrometers . Glasses are bonded to <100> silicon and thinned through CMP (Chemical Mechanical Polishing). The chamber and channels are formed by silicon wet etching. Mechanical characteristics (such as deflection of the glass diaphragm by the oil pressure) and optical characteristics (such as focal plane shift) of the variable focusing lens are estimated by modeling. The variable focusing lens can apply to optical pickup, CCD camera and microscope etc.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Si-Hong Ahn, Si-Hong Ahn, Yong-Kweon Kim, Yong-Kweon Kim, } "Design and fabrication of variable focusing lens", Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); doi: 10.1117/12.322093; https://doi.org/10.1117/12.322093
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