Microfluidic devices for u-TAS applications fabricated by polymer hot embossing

Holger Becker; Wolfram Dietz

doi:10.1117/12.322081

10 September 1998 Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing

Holger Becker, Wolfram Dietz

Author Affiliations +

Proceedings Volume 3515, Microfluidic Devices and Systems; (1998) https://doi.org/10.1117/12.322081
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

Polymer microfabrication methods are becoming increasingly important as low-cost alternatives to the silicon or glass- based MEMS technologies. We present in this paper hot embossing as a replication method for planar microstructures based on polymer substrates. Several chips containing microchannels for capillary electrophoresis applications with a range of channel widths between 0.8 micrometers and 100 micrometers have been produced by this method, yielding a very good structural replication and short production times.

Citation Download Citation

Holger Becker and Wolfram Dietz "Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing", Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); https://doi.org/10.1117/12.322081

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE