Microfluidic devices for u-TAS applications fabricated by polymer hot embossing

Holger Becker; Wolfram Dietz

doi:10.1117/12.322081

10 September 1998 Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing

Holger Becker; Wolfram Dietz

Author Affiliations +

Proceedings Volume 3515, Microfluidic Devices and Systems; (1998) https://doi.org/10.1117/12.322081
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

Polymer microfabrication methods are becoming increasingly important as low-cost alternatives to the silicon or glass- based MEMS technologies. We present in this paper hot embossing as a replication method for planar microstructures based on polymer substrates. Several chips containing microchannels for capillary electrophoresis applications with a range of channel widths between 0.8 micrometers and 100 micrometers have been produced by this method, yielding a very good structural replication and short production times.

Citation Download Citation

Holger Becker, Holger Becker, Wolfram Dietz, Wolfram Dietz, } "Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing", Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); doi: 10.1117/12.322081; https://doi.org/10.1117/12.322081

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