Paper
10 September 1998 Selective hydrophobic and hydrophilic texturing of surfaces using photolithographic photodeposition of polymers
Darren K. Jones, Carlos H. Mastrangelo, Mark A. Burns, David T. Burke
Author Affiliations +
Proceedings Volume 3515, Microfluidic Devices and Systems; (1998) https://doi.org/10.1117/12.322075
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
The control and localization of small volumes of aqueous solutions inside miniature reactors is a topic of growing significance. A simple control method relies on patterning regions of different wetability that define and guide the liquid spread within these systems. In this paper photolithographic photodeposition is demonstrated as a technique for texturing patterned surfaces. Hydrophobic surfaces are created by selectively photopolymerizing trifluorochloroethylene gas (C2F3Cl) through a quartz mask. Similarly, hydrophilic surfaces are created via acetylene (C2H2) photopolymerization. These surfaces are demonstrated to provide a simple and effective means of fluidic control and localization.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Darren K. Jones, Carlos H. Mastrangelo, Mark A. Burns, and David T. Burke "Selective hydrophobic and hydrophilic texturing of surfaces using photolithographic photodeposition of polymers", Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); https://doi.org/10.1117/12.322075
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CITATIONS
Cited by 9 scholarly publications and 2 patents.
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KEYWORDS
Polymers

Quartz

Microfluidics

Control systems

Photopolymerization

Ultraviolet radiation

Lamps

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