5 October 1998 High-precision multiple-degree-of-freedom piezoelectric actuator
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Proceedings Volume 3519, Microrobotics and Micromanipulation; (1998) https://doi.org/10.1117/12.325731
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States
This paper describes the construction and control of a two Degree-Of-Freedom (DOF) piezoelectric actuator. This actuator is part of a 6 DOF manipulator capable of linear resolution to 2 nanometer and angular resolution to 1 arc- second. Design of this actuator differs from the existing ones in that it has a monolithic structure which enables a high bandwidth, high force realization. The actuator is controlled by the TMS320C31 Digital Signal Processor residing on a standard Pentium PC. A number of nonlinearities exist in the actuator, stemming from the geometry and materials properties. For example, coupling of the actuator elements can be modeled as a soft spring which increases scale factor at high actuation levels. In this work, a combination of feedforward (input shaping) and feedback control are applied to reduce the effects of (1) scale factor nonlinearities, (2) hysteresis, and (3) output oscillations. Application of this actuator include: optoelectronics assembly, optical fiber alignment, and semiconductor processing.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Timothy N. Chang, Timothy N. Chang, Xuemei Sun, Xuemei Sun, Vincenzo Pappano, Vincenzo Pappano, Zhiming Ji, Zhiming Ji, Reggie Caudill, Reggie Caudill, } "High-precision multiple-degree-of-freedom piezoelectric actuator", Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998); doi: 10.1117/12.325731; https://doi.org/10.1117/12.325731

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