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5 October 1998 Laser-machined components for microanalytical and chemical separation devices
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Proceedings Volume 3519, Microrobotics and Micromanipulation; (1998)
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States
Excimer lasers have proven to be powerful tools for machining polymeric components used in microanalytical and microchemical separation devices. We report the use of laser machining methods to produce microfluidic channels and liquid/liquid contact membranes for a number of devices fabricated at our laboratory. Microchannels 50- to 100- micrometers -wide have been produced directly in bulk polycarbonate chips using a direct-write laser micromachining system. Wider microchannels have been produced by laser machining paths through sheets of polyimide film, then sandwiching the patterned piece between solid chips of polycarbonate stock. A comparison of direct-write and mask machining processes used to produce some of the microfluidic features is made. Examples of microanalytical devices produced using these methods are presented. Included are microdialysis units used to remove electrolytes from liquid samples and electrophoretic separation devices, both used for extremely low volume samples intended for mass spectrometric analysis. A multilayered microfluidic device designed to analyze low volume groundwater samples for hazardous metals and a fluidics motherboard are also described. Laser machining processes have also been explored for producing polymeric membranes suitable for use in liquid/liquid contactors used for removal of soluble hazardous components from waste streams. A step-and-repeat mask machining process was used to produce 0.5 X 8 cm membranes in 25- and 50-micrometers -thick polyimide. Pore diameters produced using this method were five and ten micrometers. The laser machined membranes were sputter coated with PTFE prior to use to improve fluid breakthrough characteristics.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dean W. Matson, Peter M. Martin, and Wendy D. Bennett "Laser-machined components for microanalytical and chemical separation devices", Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998);


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