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5 October 1998 New developments in 3D computer vision for microassembly
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Proceedings Volume 3519, Microrobotics and Micromanipulation; (1998)
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States
Optical Microscopes are in use to view and image biological and industrial samples. This article describes the use of such a microscope in combination with a 3D computer vision system for micro object inspection at micron scale. Combining optics and vision algorithms can provide high resolution 3D position measurements. This paper describes new vision algorithms, their results, and several of their applications. A first part explains our principles of position measurement: First we present the interest of combining optical magnification and pattern matching, and describe in which conditions it works the best. Then we show how 2D standard pattern matching can be extended to 3D without z-scanning algorithms like autofocusing. Finally we present results showing that submicron absolute accuracy and 10 nanometers resolution can be obtained. One application is the tracking of the glass tip of a microrobot which can be used for biological single-cells manipulations. The last application is the characterization of the motion and force parameters of a Shape Memory Alloy Microgripper. In the second part we describe a passive approach to compute 3D depth information from parts in focus (passive auto focus algorithms), as well as latest developments to inspect etched micro parts being out of focus (depth computation from blurred edges). Several industrial examples like surface characterization and the measurement of holes drilled by laser will be presented and discussed. Future developments will include dynamic 3D measurements for microactuator characterization, automatic modeling and 3D visualization of dynamic behaviors like force sensing in microrobotics.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Armin Sulzmann, P. Boillat, and Jacques Jacot "New developments in 3D computer vision for microassembly", Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998);

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