Characterization of a geometrically desensitized interferometer for flatness testing

Xavier Colonna de Lega; James F. Biegen; Dave Stephenson; Peter J. de Groot

doi:10.1117/12.334344

29 December 1998 Characterization of a geometrically desensitized interferometer for flatness testing

Xavier Colonna de Lega, James F. Biegen, Dave Stephenson, Peter J. de Groot

Proceedings Volume 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV; (1998) https://doi.org/10.1117/12.334344
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

We describe the detailed design of a geometrically desensitized interferometer using two transmission diffraction gratings. A number of models of the instrument are used to eliminate object ghosts and stray light contributions. We then investigate analytically the influence of object slope variations on the instrument precision. We show that the part can be located at a measurement location where the metrology is optimized. Analytical and raytracing models demonstrate excellent agreement with experiment.

Citation Download Citation

Xavier Colonna de Lega, James F. Biegen, Dave Stephenson, and Peter J. de Groot "Characterization of a geometrically desensitized interferometer for flatness testing", Proc. SPIE 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV, (29 December 1998); https://doi.org/10.1117/12.334344

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