29 December 1998 Multicolor fringe projection system with enhanced 3D reconstruction of surfaces
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Proceedings Volume 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV; (1998) https://doi.org/10.1117/12.334331
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States
Abstract
Most optical topology systems use a single wavelength laser for projection, using a swept spot, a moving line, or a projected grating. In a typical projected grating system, the gratings are shifted and a series of images are used to recover the 3D shape of the target. When the series of images is analyzed in the normal phase shift manner, the resulting 2D phase map typically has phase unwrapping problems due to noise and Nyquist limits. Surfaces with large vertical discontinuities present the biggest problem in 3D shape recovery. This paper looks at simultaneously projecting multiple wavelengths onto a surface to help avoid problems in unwrapping the 2D phase map. Using multiple wavelengths, the interferometer mirror does not have to be rotated to change the grating pitch and some operations can be done in parallel which reduces scanning time. Limitations and improvements in the current system will be discussed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernard R. Gilbert, Bernard R. Gilbert, Joel H. Blatt, Joel H. Blatt, } "Multicolor fringe projection system with enhanced 3D reconstruction of surfaces", Proc. SPIE 3520, Three-Dimensional Imaging, Optical Metrology, and Inspection IV, (29 December 1998); doi: 10.1117/12.334331; https://doi.org/10.1117/12.334331
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