Thin film waveguide sensors for chemical detection

Pekka Ayras; David F. Geraghty; Seppo Honkanen; Karen M. Grace; Basil I. Swanson; Karl C. Shrouf; Xiaoguang Yang; Pekka Katila; Matti J. Leppihalme; Ari Tervonen; Nasser Peyghambarian

doi:10.1117/12.341045

26 February 1999 Thin film waveguide sensors for chemical detection

Pekka Ayras, David F. Geraghty, Seppo Honkanen, Karen M. Grace, Basil I. Swanson, Karl C. Shrouf, Xiaoguang Yang, Pekka Katila, Matti J. Leppihalme, Ari Tervonen, Nasser Peyghambarian

Author Affiliations +

Proceedings Volume 3537, Electro-Optic, Integrated Optic, and Electronic Technologies for Online Chemical Process Monitoring; (1999) https://doi.org/10.1117/12.341045
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

A chemical sensor scheme, based on selective sensing surfaces and highly sensitive integrated optical transduction is presented. Self-assembly techniques are used to covalently attach species selective films onto the surface of silicon nitride waveguides. Exposure to targeted analytes results in selective absorption of these molecules onto the waveguide surface, causing a change in the effective refractive index of the guided modes. These relative changes in effective refractive indices of TM and TE modes are measured using Zeeman interferometry. The measurements demonstrate reversible, real time sensing of volatile organic compounds at ppm level. Improvements in the waveguide design are proposed to further increase the sensor performance.

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Pekka Ayras, David F. Geraghty, Seppo Honkanen, Karen M. Grace, Basil I. Swanson, Karl C. Shrouf, Xiaoguang Yang, Pekka Katila, Matti J. Leppihalme, Ari Tervonen, and Nasser Peyghambarian "Thin film waveguide sensors for chemical detection", Proc. SPIE 3537, Electro-Optic, Integrated Optic, and Electronic Technologies for Online Chemical Process Monitoring, (26 February 1999); https://doi.org/10.1117/12.341045

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