Fabrication and characterization of gas-sensitive layers based on nanocrystalline materials

Patrick Keller; Karina Zweiacker; Joerg-Uwe Meyer

doi:10.1117/12.333737

18 December 1998 Fabrication and characterization of gas-sensitive layers based on nanocrystalline materials

Patrick Keller, Karina Zweiacker, Joerg-Uwe Meyer

Proceedings Volume 3539, Chemical Microsensors and Applications; (1998) https://doi.org/10.1117/12.333737
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

A new generation of solid state sensors based on nanocrystalline BaTiO₃ films containing various semiconducting oxides has been developed. The sensors were fabricated from BaTiO₃ based nanopowder mixtures using thick film technology and were characterized regarding their CO₂-gas sensitivity at different operation temperatures and gas environments. It was found that the sensors operate over a wide range of CO₂ concentrations. Interfering gases have only minor effects on the sensor response. By using miniaturized Al₂O₃-substrates as carriers for the sensitive nanocrystalline layer a significant decrease of the power and powder consumption for each sensor was achieved.

Citation Download Citation

Patrick Keller, Karina Zweiacker, and Joerg-Uwe Meyer "Fabrication and characterization of gas-sensitive layers based on nanocrystalline materials", Proc. SPIE 3539, Chemical Microsensors and Applications, (18 December 1998); https://doi.org/10.1117/12.333737

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