Gas detection with work function sensors

Theodore Doll; Ignaz Eisele

doi:10.1117/12.333736

18 December 1998 Gas detection with work function sensors

Theodore Doll, Ignaz Eisele

Proceedings Volume 3539, Chemical Microsensors and Applications; (1998) https://doi.org/10.1117/12.333736
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

The work functions principle of gas sensing is dedicated for room or slightly elevated temperature of operation as signal contributions from physisorption as well chemisorption will be detectable. The sensor principle best suited for these conditions are FET transistors either with diffusible gates made of Palladium or polymers or designed with an air gap that makes the inner surface of the gate capacitance accessible to gases. The latter allow to incorporate almost all groups of sensitive materials if a hybrid construction is used. In comparison to the broad investigations made on conductivity sensors the development of sensing layers specific for work function gas-FET is in an early state. However, the models available for metal oxides or electrochemistry can be adopted to this surface potential method. The sensors allow to use the electroadsorptive effect and withstand a field test, e.g. for ozone detection. As the results show, work function sensors are capable for obtaining micro gas sensors with low power consumption suitable for low cost applications.

Citation Download Citation

Theodore Doll and Ignaz Eisele "Gas detection with work function sensors", Proc. SPIE 3539, Chemical Microsensors and Applications, (18 December 1998); https://doi.org/10.1117/12.333736

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