Kinetic characteristics of SnO2 thin-film gas sensors for environmental monitoring

Ghennadii S. Korotchenkov; Vladimir I. Brynzari; Sergei V. Dmitriev

doi:10.1117/12.333749

18 December 1998 Kinetic characteristics of SnO₂ thin-film gas sensors for environmental monitoring

Ghennadii S. Korotchenkov, Vladimir I. Brynzari, Sergei V. Dmitriev

Proceedings Volume 3539, Chemical Microsensors and Applications; (1998) https://doi.org/10.1117/12.333749
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

In this report we presented results of gas sensitivity' kinetics analysis for undoped SnO₂ thin films, deposited by spray pyrolysis method, using SnCl₄x5H₂O alcohol solution. The comparison of gas sensitivity's kinetics in measurement cycles air yields {air+(0.08 - 1.7%)CO} yields air and air yields (N₂ + 0.5%O₂} yields air for different thickness of SnO₂ films (d equals 40 - 200 nm) and operating temperature (T equals 150 - 400 degree(s)C) was carried out. We have determined the kinetic parameters ((tau) and E_act) and made a conclusion that kinetics of gas sensitivity is limited by the rate of SnO₂ surface refilling by oxygen.

Citation Download Citation

Ghennadii S. Korotchenkov, Vladimir I. Brynzari, and Sergei V. Dmitriev "Kinetic characteristics of SnO₂ thin-film gas sensors for environmental monitoring", Proc. SPIE 3539, Chemical Microsensors and Applications, (18 December 1998); https://doi.org/10.1117/12.333749

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