18 December 1998 Kinetic characteristics of SnO2 thin-film gas sensors for environmental monitoring
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Proceedings Volume 3539, Chemical Microsensors and Applications; (1998) https://doi.org/10.1117/12.333749
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States
Abstract
In this report we presented results of gas sensitivity' kinetics analysis for undoped SnO2 thin films, deposited by spray pyrolysis method, using SnCl4x5H2O alcohol solution. The comparison of gas sensitivity's kinetics in measurement cycles air yields {air+(0.08 - 1.7%)CO} yields air and air yields (N2 + 0.5%O2} yields air for different thickness of SnO2 films (d equals 40 - 200 nm) and operating temperature (T equals 150 - 400 degree(s)C) was carried out. We have determined the kinetic parameters ((tau) and Eact) and made a conclusion that kinetics of gas sensitivity is limited by the rate of SnO2 surface refilling by oxygen.
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Ghennadii S. Korotchenkov, Ghennadii S. Korotchenkov, Vladimir I. Brynzari, Vladimir I. Brynzari, Sergei V. Dmitriev, Sergei V. Dmitriev, } "Kinetic characteristics of SnO2 thin-film gas sensors for environmental monitoring", Proc. SPIE 3539, Chemical Microsensors and Applications, (18 December 1998); doi: 10.1117/12.333749; https://doi.org/10.1117/12.333749
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